Dr. Yan Chen
at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 25 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Refractive index, Data modeling, Optical properties, Dielectrics, Scatterometry, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Process modeling

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Thin films, Lithography, Metrology, Roentgenium, Error analysis, Scanning electron microscopy, Process control, Deposition processes, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 13 April 2005
Proc. SPIE. 5733, Photonic Crystal Materials and Devices III
KEYWORDS: Bistability, Thin films, Refractive index, Mirrors, Crystals, Photonic crystals, Nonlinear optics, Transmittance, Nonlinear crystals, Phase shifts

Proceedings Article | 21 June 2002
Proc. SPIE. 4626, Biomedical Nanotechnology Architectures and Applications
KEYWORDS: Microfluidics, Biosensing, Optical lithography, Waveguides, Sensors, Luminescence, Fluorescence spectroscopy, Integrated optics, Biological research, Optical microcavities

Proceedings Article | 6 June 2002
Proc. SPIE. 4629, Laser Resonators and Beam Control V
KEYWORDS: Optical components, Refractive index, Phase shifting, Resonators, Signal attenuation, Nonlinear optics, Nonlinear response, Resonance enhancement, Phase shifts, Absorption

Proceedings Article | 4 June 2002
Proc. SPIE. 4625, Clinical Diagnostic Systems: Technologies and Instrumentation
KEYWORDS: Biosensing, Waveguides, Sensors, Luminescence, Dielectrics, Biosensors, Biological research, Spherical lenses, Optical microcavities, Absorption

Showing 5 of 7 publications
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