Mr. Yan Riopel
OPC Process Engineer at Altis Semiconductor
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 20, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Lithographic illumination, Scanners, Manufacturing, Scanning electron microscopy, Relays, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Fiber optic illuminators

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