Dr. Yan Tang Profile

Dr. Yan Tang

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Publications (3)

Proceedings Article | 24 November 2021 Paper

Electrically reconfigurable terahertz digital metasurface based on vanadium dioxide phase transition

Qinling Deng, Ruirui Song, Yan Tang, Shaolin Zhou

Proceedings Volume 12066, 1206607 (2021) https://doi.org/10.1117/12.2601956

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Proceedings Article | 25 October 2016 Paper

Topography measurement of micro structure by modulation-based method

Yi Zhou, Yan Tang, Junbo Liu, Qinyuan Deng, Yiguang Cheng, Song Hu

Proceedings Volume 9685, 968505 (2016) https://doi.org/10.1117/12.2243599

KEYWORDS: Modulation, Light sources, Interferometry, Light, Optical interferometry, Scanning tunneling microscopy, CCD cameras, Microfabrication, Confocal microscopy, Imaging systems

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Proceedings Article | 25 October 2016 Paper

UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication

Qian Deng, Junbo Liu, Shaolin Zhou, Yan Tang, Lixin Zhao, Song Hu, Yinghong Chen

Proceedings Volume 9685, 96850M (2016) https://doi.org/10.1117/12.2243456

KEYWORDS: Ultraviolet radiation, Lithography, Lithographic illumination, Photomasks, Ions, Diffraction, UV optics, Nanoimprint lithography, Second-harmonic generation, Semiconducting wafers

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