Prof. Yanfeng Chen
at National Lab of Solid State Microstructures
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | June 30, 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Nanolithography, Metals, Gold, Nickel, Nanoimprint lithography, Nanotechnology, Etching, Optical storage, Biosensing, Optical components

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