Yang-Kyu Choi
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 October 2003 Paper
Yang-Kyu Choi, Jeff Grunes, Joon Sung Lee, Ji Zhu, Gabor Somorjai, Luke Lee, Jeffrey Bokor
Proceedings Volume 5220, (2003) https://doi.org/10.1117/12.505409
KEYWORDS: Silicon, Lithography, Platinum, Electron beam lithography, Oxides, Nanoimprint lithography, Low pressure chemical vapor deposition, Systems modeling, Capacitance, Nanowires

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