Yang-Kyu Choi
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | October 15, 2003
Proc. SPIE. 5220, Nanofabrication Technologies
KEYWORDS: Oxides, Lithography, Electron beam lithography, Silicon, Platinum, Capacitance, Low pressure chemical vapor deposition, Nanoimprint lithography, Systems modeling, Nanowires

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top