Prof. Yang Bu Profile

Prof. Yang Bu

at Shanghai Optoelectronics Science and Technology In

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 9 October 2021 Poster + Paper

Measurement of phase retardation and fast axis of a quarter-wave plate using vector beams and Fourier analysis

Fanchun Tang, Yang Bu, Fang Wu, Xiangzhao Wang

Proceedings Volume 11899, 118991A (2021) https://doi.org/10.1117/12.2602802

KEYWORDS: Phase measurement, Phase shift keying, Modulation, Wave plates, Beam analyzers, Polarimetry, Charge-coupled devices, Polarizers, Radon transform, Light sources

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Proceedings Article | 9 October 2021 Poster + Paper

Detection of electrolyte elements in human blood based on laser-induced breakdown spectroscopy

Yuanhang Wang, Yang Bu, Yachao Cai, Xiangzhao Wang

Proceedings Volume 11900, 1190032 (2021) https://doi.org/10.1117/12.2602525

KEYWORDS: Laser induced breakdown spectroscopy, Sodium, Liquids, Blood, Potassium, Wavelet transforms, Plasma, Laser spectroscopy

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Proceedings Article | 9 October 2021 Poster + Paper

Design and analysis of bilayer metallic grating polarizer with tapered slits in deep ultraviolet band

Fang Wu, Yang Bu, Fanchun Tang, Xiangzhao Wang

Proceedings Volume 11903, 119031I (2021) https://doi.org/10.1117/12.2602787

KEYWORDS: Metals, Dielectrics, Dielectric polarization, Polarizers, Optical design, Modulation, Deep ultraviolet, Tolerancing, Diffraction gratings

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Proceedings Article | 9 October 2021 Poster + Paper

Spatial characteristics of spectral intensity of laser induced plasma

Chenwei Sun, Yang Bu, Yuanhang Wang, Fang Wu, Yachao Cai, Xiangzhao Wang

Proceedings Volume 11904, 119041C (2021) https://doi.org/10.1117/12.2602775

KEYWORDS: Plasma, Optical simulations, Electrons, Particles, Ions, Laser induced breakdown spectroscopy, Signal detection, Laser ablation, Ionization, Aluminum

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Proceedings Article | 15 January 2021 Paper

Epidermal layer recognition of optical coherence tomography skin images

Chenming Yang, Zhongliang Li, Nan Nan, Yang Bu, Xiangzhao Wang

Proceedings Volume 11761, 117610P (2021) https://doi.org/10.1117/12.2586659

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Proceedings Article | 18 December 2019 Paper

Research on LIBS quantitative analysis of heavy metal concentration in polluted water-based on Fourier self-deconvolution method

Yuanhang Wang, Yang Bu, Fang Wu, Yi Cao, Yingjie Yu, Xiangzhao Wang

Proceedings Volume 11337, 113370P (2019) https://doi.org/10.1117/12.2544699

KEYWORDS: Lead, Laser induced breakdown spectroscopy, Metals, Quantitative analysis, Liquids, Chemical elements, Plasma, Deconvolution

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SPIE Journal Paper | 24 January 2019

Predictor of thermal aberrations via particle filter for online compensation

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Weijie Shi, Yang Bu, Xiangzhao Wang

JM3, Vol. 18, Issue 01, 013502, (January 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.013502

KEYWORDS: Particle filters, Filtering (signal processing), Thermal modeling, Particles, Semiconducting wafers, Projection systems, Lithography, Photomasks, Data modeling, Calibration

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SPIE Journal Paper | 11 April 2018

Modeling and optimization of lens heating effect for lithographic projector

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Yang Bu, Xiangzhao Wang

JM3, Vol. 17, Issue 02, 023501, (April 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.2.023501

KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

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Proceedings Article | 20 March 2018 Paper

Prediction of lens heating induced aberration via particle filter in optical lithography

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Weijie Shi, Yang Bu, Xiangzhao Wang

Proceedings Volume 10587, 105871K (2018) https://doi.org/10.1117/12.2297338

KEYWORDS: Particle filters, Semiconducting wafers, Lithography, Thermal modeling, Projection systems, Data modeling, Optical lithography, Manufacturing

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Proceedings Article | 24 March 2017 Paper

The thermal aberration analysis of a lithography projection lens

Yanjie Mao, Sikun Li, Gang Sun, Jian Wang, Lifeng Duan, Yang Bu, Xiangzhao Wang

Proceedings Volume 10147, 101471P (2017) https://doi.org/10.1117/12.2258037

KEYWORDS: Lens design, Thermal modeling, Lithography, Optical lithography, Refractive index, Optical design, Thermal analysis, Wavefront aberrations, Optical components, Silica, Photomasks

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Proceedings Article | 5 October 2011 Paper

Analytical model for EUV mask diffraction field calculation

Yuting Cao, Xiangzhao Wang, Andreas Erdmann, Peng Bu, Yang Bu

Proceedings Volume 8171, 81710N (2011) https://doi.org/10.1117/12.896579

KEYWORDS: Photomasks, Diffraction, Mirrors, Extreme ultraviolet, Reflectivity, Systems modeling, Extreme ultraviolet lithography, Error analysis, Scattering, Calibration

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