Yang Deng
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 March 2019
Proc. SPIE. 10928, High Contrast Metastructures VIII
KEYWORDS: Diffraction, Optical lithography, Scattering, Ultraviolet radiation, Silicon, Light scattering, Integrated optics, Antennas, System integration, UV optics

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