Mr. Yang D. Hong
at Univ of Queensland
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Semiconductors, Oxides, Data modeling, Sensors, Calibration, Microscopy, Interfaces, Resistance, Capacitance, Particle filters

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