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Huabin Yang
PhD Student at Changchun Inst of Optics Fine Mechanics & Physics
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Publications (1)
Proceedings Article | 18 December 2014 Paper
In-situ and real time stress of 30.4-nmMo/Si multilayer mirror for the moon-based EUV camera
Yun-peng Li, Bo Chen, Fei He, Hua-bin Yang, Xiao-duo Wang, Xin Zheng, Xiao-dong Wang, Hong-ji Zhang, Hai-feng Wang, Jian-lin Cao
Proceedings Volume 9295, 929509 (2014) https://doi.org/10.1117/12.2073023
KEYWORDS: Multilayers, Mirrors, Temperature metrology, Photovoltaics, Extreme ultraviolet, Reflectivity, Cameras, Annealing, EUV optics, Mechanics
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