Yang Li
at Yangtze Memory Technologies Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Databases, Manufacturing, Computer simulations, Design for manufacturing

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Roads, Data modeling, Databases, Silicon, Manufacturing, Neural networks, Machine learning, Semiconducting wafers, Data analysis, Design for manufacturability

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Data modeling, Copper, Manufacturing, Chemical vapor deposition, 3D modeling, Semiconducting wafers, Process modeling, Chemical mechanical planarization, Back end of line, Design for manufacturability

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Oxides, Polishing, Data modeling, Calibration, Manufacturing, 3D modeling, Transmission electron microscopy, Process modeling, Chemical mechanical planarization, Front end of line

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