Yang Liu
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Oxides, Thin films, Silica, Ultraviolet radiation, Annealing, Silicon, Capacitance, Nanocrystals, Semiconducting wafers, Circuit switching

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Thin films, Refractive index, Silica, Optical properties, Dielectrics, Ions, Silicon, Profiling, Ion implantation, Nanocrystals

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Silica, Annealing, X-rays, Ions, Silicon, Oxygen, Profiling, Chemical analysis, Nanocrystals, Oxidation

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