Yang Liu
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 29 March 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Capacitance, Oxides, Ultraviolet radiation, Silicon, Nanocrystals, Annealing, Silica, Semiconducting wafers, Thin films, Circuit switching

Proceedings Article | 29 March 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Nanocrystals, Silicon, Silica, Refractive index, Dielectrics, Optical properties, Profiling, Ions, Thin films, Ion implantation

Proceedings Article | 29 March 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Silicon, Annealing, Silica, Nanocrystals, Ions, Chemical analysis, Oxygen, X-rays, Profiling, Oxidation

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