Dr. IMECAS Library
at IMECAS
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 3 November 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Optical proximity correction, Metals, Photomasks, Algorithm development, Semiconducting wafers, Binary data, Image processing, Resolution enhancement technologies, Optical lithography, SRAF

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