Prof. Yangjin Kim
Assistant Professor
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 16, 2018
Proc. SPIE. 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
KEYWORDS: Mirrors, Phase shifting, Ferroelectric materials, Optical testing, Wavelength tuning, Algorithm development, Evolutionary algorithms, Phase shifts, Fizeau interferometers, Algorithms

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Fringe analysis, Detection and tracking algorithms, Interferometers, Error analysis, Silicon, Reflectivity, Fourier transforms, Interferometry, Wavelength tuning, Algorithm development, Semiconducting wafers, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Semiconductors, Lithography, Detection and tracking algorithms, Reflectivity, Fourier transforms, Wavelength tuning, Photomasks, Algorithm development, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Wafer-level optics, Polishing, Lithium niobate, Detection and tracking algorithms, Crystals, Wavelength tuning, Semiconducting wafers, Surface finishing, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Quadrature amplitude modulation, Glasses, Phase interferometry, Precision measurement, Photomasks, Extreme ultraviolet, Algorithm development, Americium, Phase shifts

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Semiconductors, Refractive index, Beam splitters, Glasses, Interferometry, Optical testing, Wavelength tuning, Photomasks, Phase shifts, Fizeau interferometers

Showing 5 of 7 publications
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