Yaniv Abramovitz
at Applied Materials Israel Ltd
SPIE Involvement:
Publications (12)

Proceedings Article | 30 April 2023 Poster
Proceedings Volume 12496, 1249623 (2023) https://doi.org/10.1117/12.2669984
KEYWORDS: Overlay metrology, Scanning electron microscopy, Design and modelling, Metrology, Semiconducting wafers, Visibility, Shrinkage, Optical metrology, Design rules, Calibration

Proceedings Article | 27 April 2023 Presentation + Paper
A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. Lorusso, A.-L. Charley
Proceedings Volume 12496, 124961X (2023) https://doi.org/10.1117/12.2657968
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Monolayers, Scatterometry, 2D materials, Metrology, Atomic force microscopy, Raman spectroscopy, Silicon, Histograms

Proceedings Article | 27 April 2023 Presentation + Paper
Sangho Jo, Jongsu Kim, Youngsik Park, Muyoung Lee, Jinhong Park, Changmin Park, Jeong-Ho Yeo, Yaniv Abramovitz, You Jin Kim, Asaf Shoham, Shmuel Ben Nissim
Proceedings Volume 12496, 124960K (2023) https://doi.org/10.1117/12.2657672
KEYWORDS: Scanning electron microscopy, Overlay metrology, Semiconducting wafers, Scanners, Optical parametric oscillators, Measurement devices, Lithography, Error control coding, Optical alignment, Metrology

SPIE Journal Paper | 4 November 2022
JM3, Vol. 21, Issue 04, 041605, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041605
KEYWORDS: Etching, System on a chip, Image processing, Sensors, Lithography, Semiconducting wafers, Distance measurement, Process control, Transistors, Signal to noise ratio

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC120530D (2022) https://doi.org/10.1117/12.2614221
KEYWORDS: Overlay metrology, Double patterning technology, Edge roughness, Scanning electron microscopy, Manufacturing, Line width roughness, Line edge roughness, Integrated circuits, Electron microscopy, Critical dimension metrology

Showing 5 of 12 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top