Dr. Yanli Meng
Associate Professor at Northeast Normal Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 September 2018
Proc. SPIE. 10750, Reflection, Scattering, and Diffraction from Surfaces VI
KEYWORDS: Thin films, Spatial frequencies, Scattering, X-rays, Reflectivity, Surface roughness, Atomic force microscopy, Atomic layer deposition, Aluminum

Proceedings Article | 29 September 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: X-ray optics, Scattering, X-rays, Silicon, Light scattering, Laser scattering, Surface roughness, Reflectometry, Electromagnetic scattering theory, Zerodur

Proceedings Article | 9 September 2009
Proc. SPIE. 7448, Advances in X-Ray/EUV Optics and Components IV
KEYWORDS: X-ray optics, Spatial frequencies, Scattering, X-rays, Silicon, Light scattering, Laser scattering, Surface roughness, Atomic force microscopy, Semiconducting wafers

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