Dr. Yannick Bourgin
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 14 September 2018
Proc. SPIE. 10744, Laser Beam Shaping XVIII
KEYWORDS: Lithography, Diffractive optical elements, Etching, Metals, High power lasers, Laser welding, Semiconductor lasers, Computer generated holography, Diffusers, Gas lasers

Proceedings Article | 20 October 2016
Proc. SPIE. 10032, 32nd European Mask and Lithography Conference
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Polarizers, Scanning electron microscopy, Photoresist materials, Photomasks, Beam shaping, Semiconducting wafers, Vestigial sideband modulation

Proceedings Article | 21 April 2016
Proc. SPIE. 9884, Nanophotonics VI
KEYWORDS: Gold, Apertures, Lithography, Plasmonics, Nanostructures, Lithographic illumination, Polarization, Reflection, Polymers, Glasses, Chromium, Photomasks, Semiconducting wafers, Nanolithography, Absorption

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Electron beam lithography, Optical lithography, Polymers, Metals, Coating, Scanning electron microscopy, Photoresist materials, Photomasks, Aluminum, Double patterning technology, Nanolithography, Diffraction gratings

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Fabrication, Optical components, Lithography, Electron beam lithography, Diffraction, Computing systems, Printing, Micro optics, Optical resolution, Photomasks, Beam shaping, 3D scanning, Binary data, Vestigial sideband modulation

Showing 5 of 8 publications
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