Unspecified Yannick Rivoira Profile

Yannick Rivoira

at CEA-LETI

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Life cycle assessment of etching processes for FDSOI transistors technologies

Mickaël Renaud, Aurélien Sarrazin, Joao Lopes-Barbosa, Yannick Rivoira, Isabelle Servin, François Boulard

Proceedings Volume 12958, 129580K (2024) https://doi.org/10.1117/12.3009969

KEYWORDS: Etching, Plasma etching, Plasma, Climate change, Gases, Transistors, Power consumption, Front end of line, Sustainable technology, CMOS technology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years