Prof. Yanqiu Li
Professor at Beijing Institute of Technology
SPIE Involvement:
Senior status | Conference Program Committee | Conference Chair | Author | Editor
Publications (72)

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Diffraction, Super resolution, Modulation, Polarization, Optical vortices, Beam shaping, Spiral phase plates

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Lithography, Monochromatic aberrations, Error analysis, Manufacturing, Wavefronts, Distortion, Image quality, Objectives, Tolerancing, Assembly tolerances

PROCEEDINGS ARTICLE | January 12, 2018
Proc. SPIE. 10622, 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices
KEYWORDS: Lithography, Visible radiation, Finite-difference time-domain method, Polarization, Silver, Wave plates, Quantitative analysis

PROCEEDINGS ARTICLE | October 24, 2017
Proc. SPIE. 10460, AOPC 2017: Optoelectronics and Micro/Nano-Optics

PROCEEDINGS ARTICLE | October 24, 2017
Proc. SPIE. 10460, AOPC 2017: Optoelectronics and Micro/Nano-Optics
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Polarization

SPIE Journal Paper | June 16, 2017
OE Vol. 56 Issue 06
KEYWORDS: Source mask optimization, Extreme ultraviolet lithography, Lithographic illumination, Eye, Extreme ultraviolet, Reticles, Lithography, Numerical analysis

Showing 5 of 72 publications
Conference Committee Involvement (6)
Optical Design and Testing VII
12 October 2016 | Beijing, China
Optical Design and Testing VI
9 October 2014 | Beijing, China
Optical Design and Testing V
5 November 2012 | Beijing, China
Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
26 April 2012 | Xiamen, China
Advanced Microlithography Technology
12 November 2007 | Beijing, China
Showing 5 of 6 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top