Dr. Yanwei Liu
at KLA-Tencor California
SPIE Involvement:
Publications (9)

Proceedings Article | 6 October 2011
Proc. SPIE. 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX
KEYWORDS: Microscopes, X-rays, Imaging systems, Spatial resolution, X-ray lasers, Diffraction gratings, Image resolution, Modulation transfer functions, Diffraction, Gas lasers

Proceedings Article | 29 September 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: Microscopes, Zone plates, Extreme ultraviolet lithography, Objectives, Photomasks, Spatial resolution, X-ray lasers, Microscopy, Modulation, Modulation transfer functions

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Microscopes, Spatial resolution, Extreme ultraviolet lithography, Zone plates, Photomasks, Extreme ultraviolet, Image resolution, Inspection, Objectives, Modulation transfer functions

Proceedings Article | 19 February 2008
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Zone plates, X-ray microscopy, Spiral phase plates, Nickel, X-rays, Image filtering, Microscopy, Objectives, Electron beam lithography, X-ray optics

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Extreme ultraviolet, Zone plates, Spatial resolution, Microscopes, Photomasks, Imaging systems, Extreme ultraviolet lithography, Inspection, Plasma, Reflectivity

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Defect inspection, Signal detection, Defect detection, Visible radiation, Light scattering, Scattering, Extreme ultraviolet lithography

Showing 5 of 9 publications
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