Dr. Yanzhe Tang
at Zhejiang Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 10 January 2005 Paper
Proc. SPIE. 5623, Passive Components and Fiber-based Devices
KEYWORDS: Mirrors, Optical lithography, Waveguides, Silicon, Photomasks, Integrated optics, Dense wavelength division multiplexing, Demultiplexers, Phased array optics, Light wave propagation

SPIE Journal Paper | 1 November 2004
OE Vol. 43 Issue 11
KEYWORDS: Waveguides, Brain-machine interfaces, Silicon, Optical lithography, Silica, Single mode fibers, Structural design, Etching, Semiconducting wafers, Information science

Proceedings Article | 30 April 2004 Paper
Proc. SPIE. 5279, Optical Fibers and Passive Components
KEYWORDS: Oxides, Mirrors, Waveguides, Etching, Dry etching, Silicon, Photomasks, Wet etching, Semiconducting wafers, Anisotropic etching

Proceedings Article | 10 September 2002 Paper
Proc. SPIE. 4928, MEMS/MOEMS Technologies and Applications
KEYWORDS: Mirrors, Optical lithography, Atrial fibrillation, Resonators, Waveguides, Silicon, Integrated optics, Gyroscopes, Semiconducting wafers

Proceedings Article | 16 October 2001 Paper
Proc. SPIE. 4602, Semiconductor Optoelectronic Device Manufacturing and Applications

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