Yao Shuai
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 August 2009
Proc. SPIE. 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications
KEYWORDS: Infrared detectors, Thin films, Sensors, Etching, Silicon, Surface roughness, Scanning electron microscopy, Silicon films, Chemical elements, Anisotropic etching

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