Dr. Yaogang Lian
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 23, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Lithography, Statistical analysis, Data modeling, Calibration, Estimation theory, Computer simulations, Cadmium sulfide, Optical proximity correction, Statistical modeling, Process modeling

PROCEEDINGS ARTICLE | September 23, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Lithography, Coherence imaging, Apodization, Lithographic illumination, Computer simulations, Photomasks, Matrix multiplication, System on a chip, Device simulation, Light

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