Dr. Yasin Ekinci
at Paul Scherrer Institut
SPIE Involvement:
Senior status | Conference Program Committee | Author
Websites:
Publications (77)

PROCEEDINGS ARTICLE | October 26, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Light sources, Optical lithography, Photomasks, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing, Laser sintering, Diffraction gratings

PROCEEDINGS ARTICLE | October 15, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Diffraction, Reticles, Inspection, Image restoration, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, System on a chip, Defect inspection

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Diffraction, Polarization, Silicon, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Optical lithography, Molecules, Diffusion, Photoresist materials, Extreme ultraviolet lithography, High volume manufacturing, Line edge roughness, Stochastic processes, Chemically amplified resists

PROCEEDINGS ARTICLE | October 11, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Electron beam lithography, Etching, Metals, Silicon, Coating, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, System on a chip

PROCEEDINGS ARTICLE | October 8, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Optical design, Metrology, Reliability, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Defect inspection

Showing 5 of 77 publications
Conference Committee Involvement (10)
UV and Higher Energy Photonics: From Materials to Applications 2019
11 August 2019 | San Diego, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2018
19 August 2018 | San Diego, California, United States
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2017
6 August 2017 | San Diego, California, United States
Showing 5 of 10 published special sections
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