Dr. Yasin Ekinci
at Paul Scherrer Institut
SPIE Involvement:
Conference Program Committee | Author
Websites:
Publications (100)

Proceedings Article | 4 May 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Lithography, Optical lithography, Fourier transforms, Electroluminescence, Scanning electron microscopy, Printing, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Diffraction gratings

Proceedings Article | 24 March 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI

Proceedings Article | 23 March 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Microscopes, Coherence imaging, Imaging systems, Sensors, Inspection, Reflectivity, Photomasks, Extreme ultraviolet

Proceedings Article | 26 February 2020
Proc. SPIE. 11290, High Contrast Metastructures IX
KEYWORDS: Plasmonics, Nanostructures, Optical filters, Polarization, Silver, Polarizers, Wave plates, Liquid crystals, Tunable filters, Nanowires

SPIE Journal Paper | 30 January 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Extreme ultraviolet, Carbon, Reticles, Inspection, Defect detection, Coherence imaging, Photomasks, Phase measurement, Reflectivity, Microscopes

Showing 5 of 100 publications
Conference Committee Involvement (13)
Extreme Ultraviolet (EUV) Lithography XII
21 February 2021 | San Jose, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2020
25 August 2020 | San Diego, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2019
11 August 2019 | San Diego, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Showing 5 of 13 Conference Committees
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