Dr. Yasuhiro Morikawa
at ULVAC Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 December 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Microelectromechanical systems, Etching, Argon, Sputter deposition, Silicon, Magnetism, Semiconducting wafers, Anisotropic etching, Plasma, Protactinium

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