Yasunobu Someya
Scientist at Nissan Chemical Corp
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Author
Publications (8)

Proceedings Article | 12 October 2018 Presentation
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Carbon, Lithography, Etching, Metals, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, System on a chip

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, Spectroscopy, Silicon, Chromium, Reactive ion etching, Semiconducting wafers, Scanning transmission electron microscopy

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Polymethylmethacrylate, Etching, Dry etching, Polymers, Annealing, Silicon, Materials processing, Directed self assembly, Industrial chemicals

Proceedings Article | 23 March 2016 Paper
Proc. SPIE. 9782, Advanced Etch Technology for Nanopatterning V
KEYWORDS: FT-IR spectroscopy, Optical lithography, Polymethylmethacrylate, Etching, Polymers, Silicon, Directed self assembly, Plasma etching, Picosecond phenomena, Reactive ion etching, Plasma, Tin

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Polymers, Image processing, Silicon, Coating, Reflectivity, Directed self assembly, Semiconducting wafers

Showing 5 of 8 publications
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