Yasuo Hirabayashi
SiC optical sensor with antireflective moth eye at KISTEC
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Publications (1)

Proceedings Article | 16 February 2012
Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
KEYWORDS: Near infrared, Nanostructures, Continuous wave operation, Femtosecond phenomena, Silicon, Semiconductor lasers, Scanning electron microscopy, Raman spectroscopy, Laser irradiation, Pulsed laser operation

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