CONFERENCE PROCEEDINGS
Advanced Search
Yasushi Okamoto
at Tool Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 14 November 2007 Paper
Effective area partitioning for preparing parallel processing in mask data preparation
Yoshiyuki Satou, Yasushi Okamoto, Manabu Fujimoto, Hiroshi Tsuchida, Akiko Satou
Proceedings Volume 6730, 67304C (2007) https://doi.org/10.1117/12.746523
KEYWORDS: Parallel processing, Data processing, Parallel computing, Optical proximity correction, Data analysis, Analytical research, Statistical analysis, Resolution enhancement technologies, Manufacturing, Photomask technology
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top