Dr. Yasushi Washio
at Tokyo Ohka Kogyo Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Wafer-level optics, Semiconductors, Infrared imaging, Lithography, Reflectivity, Optical alignment, Microfabrication, Photoresist processing, Semiconducting wafers, Chemically amplified resists

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Microelectromechanical systems, Multilayers, Optical lithography, Etching, Nickel, Coating, Manufacturing, Plating, Photoresist processing, Semiconducting wafers

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