CONFERENCE PROCEEDINGS
Advanced Search
Yasushi Yoda
at Nikon Corp
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 20 March 2018 Paper
Enhancement of ArF immersion scanner system for advanced device node manufacturing
Yujiro Hikida, Akira Hayakawa, Yoshihiro Teshima, Tomonori Dosho, Noriaki Kasai, Yasushi Yoda, Kazuo Masaki, Yuichi Shibazaki
Proceedings Volume 10587, 105870X (2018) https://doi.org/10.1117/12.2297302
KEYWORDS: Semiconducting wafers, Scanners, Optical alignment, Overlay metrology, Control systems, Manufacturing, Lithography, Process control
Proceedings Article | 15 March 2016 Paper
Next-generation immersion scanner optimizing on-product performance for 7nm node
Yasushi Yoda, Akira Hayakawa, Satoshi Ishiyama, Yasuhiro Ohmura, Issei Fujimoto, Toru Hirayama, Yuji Shiba, Kazuo Masaki, Yuichi Shibazaki
Proceedings Volume 9780, 978012 (2016) https://doi.org/10.1117/12.2218955
KEYWORDS: Scanners, Lithography, Lithographic illumination, Control systems, Optical alignment, Semiconductors, Optical lithography, Yield improvement, Immersion lithography, Manufacturing, Semiconducting wafers, Signal processing, Distortion, Light sources, Atrial fibrillation, Wavefronts
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top