Mr. Yasuyuki Akita Profile

Yasuyuki Akita

at Tokyo Institute of Technology

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Proceedings Article | 24 February 2009 Paper

Fabrication of nanostructured ITO thin films on nanoimprinted glasses by pulsed laser deposition

Yasuyuki Akita, Yuki Sugimoto, Masahiro Mita, Hideo Oi, Osami Sakata, Mamoru Yoshimoto

Proceedings Volume 7201, 72011A (2009) https://doi.org/10.1117/12.808096

KEYWORDS: Glasses, Thin films, Sapphire, Crystals, Nanostructures, Annealing, Oxides, Thin film deposition, Nanolithography, Pulsed laser deposition

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We fabricated indium tin oxide (ITO) thin films on nanoimprinted glass substrates using pulsed laser deposition (PLD). The nanoimprinted glass substrate was prepared by thermal nanoimprint using an atomically stepped sapphire (α-Al₂O₃ single crystal) mold. Two kinds of sapphire molds were employed, one with a single step about 0.2 nm high and the other with a bunched step about 2 nm high. The surface morphology of the stepped sapphire mold was successfully transferred to the glass surface in an atomic scale. The nanoimprinted glass had a regular nanostepped pattern; one had a step height of about 0.2 nm and step separation of about 100 nm, the other had a step height of about 2 nm and step separation of about 1 μm. The ITO films were deposited at room-temperature (RT) or 200°C on the nanoimprinted glass substrates and on the non-patterned commercial glass for comparison. The ITO films deposited at RT were post-annealed for further crystallization. The surface of the ITO thin films deposited on the nanoimprinted glass well reflected the nanopattern of the glass substrate surface. Preferential crystalline orientation of the ITO thin films was achieved on the nanoimprinted glass substrates. The resistivity of ITO thin films deposited on the nanoimprinted glass was lower than that on the commercial glass, which was probably due to the higher crystal orientation of the films grown on the nanoimprinted glass surfaces.

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