Yasuyuki Akita
at Tokyo Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Oxides, Thin films, Nanostructures, Glasses, Annealing, Crystals, Sapphire, Pulsed laser deposition, Thin film deposition, Nanolithography

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