Mr. Yasuyuki Miyamoto Profile

Yasuyuki Miyamoto

Associate Professor at Tokyo Institute of Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 July 2003 Paper

Yasuyuki Miyamoto, Kazuki Sasao, Yasuo Azuma, Naotaka Kaneda, Yutaka Majima

Proceedings Volume 4999, (2003) https://doi.org/10.1117/12.479602

KEYWORDS: Gold, Photomasks, Annealing, Electron beam lithography, Molecules, Electrodes, Silicon, Scanning electron microscopy, Etching, Lithography

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Keywords/Phrases