Yasuyuki Miyamoto
Associate Professor at Tokyo Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 4999, Quantum Sensing: Evolution and Revolution from Past to Future
KEYWORDS: Gold, Lithography, Electron beam lithography, Etching, Electrodes, Annealing, Molecules, Silicon, Scanning electron microscopy, Photomasks

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