Dr. Yautzong Hsu
Sr. Engineer/Inventor at Seagate Technology LLC
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Etching, Polymers, Oxygen, Directed self assembly, Plasma etching, Picosecond phenomena, Nanoimprint lithography, Reactive ion etching, Plasma

SPIE Journal Paper | 12 August 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Servomechanisms, Beam propagation method, Scanning electron microscopy, Quartz, Magnetism, Nanoimprint lithography, Etching, Optical lithography, Lithography, Directed self assembly

SPIE Journal Paper | 13 September 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Scanning probe microscopy, Beam propagation method, Contamination, Scanning electron microscopy, Silica, Inspection, Nanoimprint lithography, Hydrogen, Particles, Critical dimension metrology

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Contamination, Silica, Particles, Inspection, Image analysis, Scanning electron microscopy, Nanoimprint lithography, Scanning probe microscopy, Critical dimension metrology, Beam propagation method

SPIE Journal Paper | 1 July 2004
JM3 Vol. 3 Issue 03
KEYWORDS: Line edge roughness, Electron beam lithography, Electron beams, Photoresist processing, Image processing, Imaging systems, Hydrogen, Etching, Polymers, Photomasks

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Electron beam lithography, Electron beams, Imaging systems, Etching, Hydrogen, Oxygen, Monte Carlo methods, Photomasks, Reactive ion etching, Photoresist processing

Showing 5 of 7 publications
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