Ms. Yawei Li Profile

Yawei Li

at Univ of Florida

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Publications (2)

Proceedings Article | 6 April 2007 Paper

Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers

Yawei Li, Toshikazu Nishida, David Arnold, Mark Sheplak

Proceedings Volume 6529, 65290D (2007) https://doi.org/10.1117/12.715797

KEYWORDS: Oxides, Sensors, Silicon, Deep reactive ion etching, Etching, Resistors, Semiconducting wafers, Reactive ion etching, Diffusion, Wheatstone bridges

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Proceedings Article | 5 April 2006 Paper

Modeling and optimization of a side-implanted piezoresistive shear-stress sensor

Yawei Li, Melih Papila, Toshikazu Nishida, Lou Cattafesta, Mark Sheplak

Proceedings Volume 6174, 617409 (2006) https://doi.org/10.1117/12.658029

KEYWORDS: Sensors, Resistance, Doping, Finite element methods, Optimization (mathematics), Silicon, Lawrencium, Resistors, Wheatstone bridges, Chemical elements

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