Yawei Li
at Univ of Florida
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 6 April 2007
Proc. SPIE. 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007
KEYWORDS: Oxides, Sensors, Etching, Silicon, Diffusion, Deep reactive ion etching, Resistors, Reactive ion etching, Semiconducting wafers, Wheatstone bridges

Proceedings Article | 5 April 2006
Proc. SPIE. 6174, Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
KEYWORDS: Sensors, Silicon, Resistance, Doping, Finite element methods, Resistors, Chemical elements, Optimization (mathematics), Lawrencium, Wheatstone bridges

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