Prof. Yayi Wei
Professor at Univ of Chinese Academy of Sciences
SPIE Involvement:
Conference Program Committee | Editorial Board Member: Journal of Micro/Nanopatterning, Materials, and Metrology | Author
Publications (108)

Proceedings Article | 10 April 2024 Poster + Paper
Yihua Zhu, Lisong Dong, Yayi Wei
Proceedings Volume 12953, 1295312 (2024) https://doi.org/10.1117/12.3010118
KEYWORDS: Critical dimension metrology, Simulations, Neural networks, Lithography, Light sources, Deep ultraviolet, Systems modeling, Excimer lasers

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12953, 1295316 (2024) https://doi.org/10.1117/12.3010575
KEYWORDS: Lithography, Plasmonics, Mathematical optimization, Photoresist materials, Matrices, Compressed sensing, Imaging systems, Reconstruction algorithms, Evanescence, Image resolution

Proceedings Article | 10 April 2024 Paper
Wenrui Wang, Hua Shao, Rui Chen, Yayi Wei
Proceedings Volume 12954, 129541F (2024) https://doi.org/10.1117/12.3010574
KEYWORDS: Etching, Data modeling, Random forests, Education and training, Machine learning, Calibration, Lithography, Decision trees, Scanning electron microscopy, Optical proximity correction

Proceedings Article | 10 April 2024 Poster + Paper
Jing Xue, Guangjian He, Taian Fan, Yun Wang, Tianchun Ye, Yayi Wei
Proceedings Volume 12953, 1295314 (2024) https://doi.org/10.1117/12.3010234
KEYWORDS: Stochastic processes, Systems modeling, Diffusion, Monte Carlo methods, Photoresist materials, Computer simulations, Molecules, Extreme ultraviolet, Photoresist processing, Particles

Proceedings Article | 10 April 2024 Poster + Paper
Chen Li, Lisong Dong, Yayi Wei
Proceedings Volume 12953, 1295315 (2024) https://doi.org/10.1117/12.3010429
KEYWORDS: Lithography, Mathematical modeling, Data modeling, Multilayers, Extreme ultraviolet, Reflection, Extreme ultraviolet lithography, Deformation, Modeling

Showing 5 of 108 publications
Conference Committee Involvement (4)
DTCO and Computational Patterning III
26 February 2024 | San Jose, California, United States
DTCO and Computational Patterning II
27 February 2023 | San Jose, California, United States
DTCO and Computational Patterning
26 April 2022 | San Jose, California, United States
Design-Technology Co-optimization XV
22 February 2021 | Online Only, California, United States
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