Prof. Yayi Wei
Professor at IMECAS
SPIE Involvement:
Senior status | Author
Publications (51)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Diffraction, Metrology, Finite-difference time-domain method, Reflection, Microelectronics, Signal detection, Overlay metrology, Diffraction gratings

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Roads, Statistical analysis, Polymers, Annealing, Coating, Microelectronics, Directed self assembly, Integrated circuits

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Photovoltaics, Printing, Photomasks, Optical proximity correction, SRAF, Critical dimension metrology, Semiconducting wafers, Model-based design, Process modeling

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Etching, Metals, Electroluminescence, Photomasks, Image classification, Source mask optimization, Molybdenum, Semiconducting wafers, Process modeling

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Feature extraction, Photomasks, Machine learning, Source mask optimization, Optical proximity correction, Optimization (mathematics)

SPIE Journal Paper | 20 December 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Semiconducting wafers, Lithography, Nitrogen, Photoresist materials, Particles, Microelectronics, Computer simulations, Fluctuations and noise, Semiconductor manufacturing, Polymers

Showing 5 of 51 publications
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