Dr. Ye Tian
Applications Engineering @ASML at
Area of Expertise:
photolithography , EUV , fiber optics , sensors , overlay , metrology
Publications (20)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Diffraction, Reticles, Metrology, Calibration, Scanners, Process control, Critical dimension metrology, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Diffraction, Metrology, Scanners, Error analysis, Control systems, Time metrology, Process control, High volume manufacturing, Critical dimension metrology, Forward error correction, Semiconducting wafers

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Reticles, Metrology, Scanners, Laser processing, Laser scanners, Photomasks, 3D scanning, Critical dimension metrology, Laser metrology, Semiconducting wafers

SPIE Journal Paper | June 20, 2013
OE Vol. 52 Issue 06
KEYWORDS: Gold, Ultrasonography, Fiber optics, Photoacoustic spectroscopy, Nanolithography, Absorption, Nanostructures, Ion beams, Signal generators, Optical fibers

PROCEEDINGS ARTICLE | April 16, 2013
Proc. SPIE. 8694, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2013
KEYWORDS: Gold, Optical fibers, Fiber optics, Nanoparticles, Ultrasonography, Photoacoustic spectroscopy, Signal generators, Nanocomposites, Pulsed laser operation, Absorption

PROCEEDINGS ARTICLE | April 16, 2013
Proc. SPIE. 8694, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2013
KEYWORDS: Gold, Optical fibers, Nanostructures, Fiber optics, Ultrasonography, Ion beams, Photoacoustic spectroscopy, Signal generators, Nanolithography, Absorption

Showing 5 of 20 publications
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