Yee Mei Foong
Engineer at GlobalFoundries Singapore Pte Ltd
SPIE Involvement:
Publications (22)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553N (2024)
KEYWORDS: Metrology, Scanning electron microscopy, Contour extraction, Machine learning, Optical proximity correction, Image processing, Electronic design automation, Design

Proceedings Article | 26 September 2019 Presentation + Paper
Proceedings Volume 11148, 111480H (2019)
KEYWORDS: Photomasks, Process modeling, Model-based design, Optical lithography, Optical proximity correction, Critical dimension metrology, 193nm lithography, Lithography, Tolerancing, Modeling

Proceedings Article | 20 March 2019 Presentation + Paper
Ao Chen, Kar Kit Koh, Yee Mei Foong, Bradley Morgenfeld, Jun Chen, Sandra Lee, Xi Chen, Hesham Omar, Mu Feng, ChangAn Wang, Keith Gronlund, Jun Lang, James Guerrero, Yiqiong Zhao
Proceedings Volume 10961, 109610F (2019)
KEYWORDS: Diffusion, SRAF, Photoresist processing, Calibration, Photo decomposable quencher, Semiconducting wafers, Process modeling, Performance modeling, 3D modeling, Error analysis

Proceedings Article | 20 March 2018 Presentation + Paper
Ao Chen, Yee Mei Foong, Jae Yeol Maeng, Nikhil Jain, Steve McDermott
Proceedings Volume 10587, 105870J (2018)
KEYWORDS: Source mask optimization, Calibration, Lithography, Critical dimension metrology

Proceedings Article | 28 September 2017 Paper
Proceedings Volume 10446, 104460V (2017)

Showing 5 of 22 publications
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