Dr. Yehiel Gotkis
Senior Principal Engineer at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Statistical analysis, Modulation, Polymers, Surface roughness, Distortion, Atomic force microscopy, Profiling, Shape analysis, Line edge roughness, Photoresist processing

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