Dr. Yen-Liang Chen
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (12)

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 127510N (2023) https://doi.org/10.1117/12.2688111
KEYWORDS: 3D mask effects, Extreme ultraviolet, Extreme ultraviolet lithography, Thermal stability, Stochastic processes, Semiconducting wafers, Refractive index, Projection systems, Photoresist materials, Photons

Proceedings Article | 18 April 2013 Paper
Proceedings Volume 8681, 86812P (2013) https://doi.org/10.1117/12.2010570
KEYWORDS: Semiconducting wafers, Overlay metrology, Artificial intelligence, Evolutionary algorithms, Quality measurement, Microscopes, Etching, Semiconductor manufacturing, Optical properties, Chemical mechanical planarization

Proceedings Article | 5 April 2012 Paper
Yen-Liang Chen, Jacky Huang, Rita Lee, Chen-Ming Wang, Chih-Ming Ke, Tsai-Sheng Gau
Proceedings Volume 8324, 83241C (2012) https://doi.org/10.1117/12.917995
KEYWORDS: Overlay metrology, Artificial intelligence, Image quality, Quality measurement, Image processing, Tolerancing, Process control, Semiconducting wafers, Optical alignment, Metrology

SPIE Journal Paper | 1 April 2011
OE, Vol. 50, Issue 04, 045601, (April 2011) https://doi.org/10.1117/12.10.1117/1.3567172
KEYWORDS: Heterodyning, Signal processing, Interferometry, Cameras, CCD cameras, Charge-coupled devices, Digital cameras, Fourier transforms, Optical engineering, Phase measurement

Proceedings Article | 24 August 2010 Paper
Proceedings Volume 7767, 77670J (2010) https://doi.org/10.1117/12.860356
KEYWORDS: Heterodyning, Interferometers, Light sources, Geometrical optics, Beam splitters, Mirrors, Phase modulation, Electrooptic modulators, Michelson interferometers, Tunable diode lasers

Showing 5 of 12 publications
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