Dr. Yen-Liang Chen
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 18 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Microscopes, Optical properties, Etching, Quality measurement, Semiconductor manufacturing, Artificial intelligence, Semiconducting wafers, Overlay metrology, Evolutionary algorithms, Chemical mechanical planarization

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Image processing, Quality measurement, Image quality, Process control, Artificial intelligence, Optical alignment, Semiconducting wafers, Tolerancing, Overlay metrology

SPIE Journal Paper | 1 April 2011
OE Vol. 50 Issue 04
KEYWORDS: Heterodyning, Signal processing, Interferometry, Cameras, CCD cameras, Charge-coupled devices, Digital cameras, Fourier transforms, Optical engineering, Phase measurement

Proceedings Article | 24 August 2010
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Mirrors, Beam splitters, Light sources, Phase modulation, Interferometers, Heterodyning, Geometrical optics, Tunable diode lasers, Electrooptic modulators, Michelson interferometers

Proceedings Article | 2 August 2010
Proc. SPIE. 7791, Interferometry XV: Applications
KEYWORDS: GRIN lenses, Refractive index, Mirrors, Interferometers, Interferometry, Phase interferometry, CMOS cameras, Electrooptic modulators, Commercial off the shelf technology, Phase shifts

Showing 5 of 11 publications
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