Prof. Yen Peng Kong
at Institute of Materials Research and Engineering
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymers, Silicon, Atomic force microscopy, Printing, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Polymer thin films

Proceedings Article | 14 November 2002
Proc. SPIE. 4937, Biomedical Applications of Micro- and Nanoengineering
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Satellites, Glasses, Particles, Silicon, Photoresist materials, Semiconducting wafers, Liquids

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Skin, Copper, Silicon, Scanning electron microscopy, Chemical analysis, Microfabrication, Electroplating

Proceedings Article | 28 September 2001
Proc. SPIE. 4560, Microfluidics and BioMEMS
KEYWORDS: Actuators, Ferroelectric materials, Microfluidics, Data modeling, Glasses, Silicon, 3D modeling, Quantitative analysis, Head, Finite element methods

Proceedings Article | 28 September 2001
Proc. SPIE. 4560, Microfluidics and BioMEMS
KEYWORDS: Actuators, Ferroelectric materials, Glasses, Silicon, 3D modeling, Head, Modal analysis, Finite element methods, Epoxies, Semiconducting wafers

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top