Ms. Yeon Hwa Lim Profile

Yeon Hwa Lim

Member of Technical Staff at MagnaChip Semiconductor

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 21 March 2006 Paper

The feasibility study of KrF HT-PSM in ArF lithography process

Yeon Hwa Lim, Hong Ik Kim, Jae Sung Choi, Jeong Gun Lee

Proceedings Volume 6154, 61544A (2006) https://doi.org/10.1117/12.656051

KEYWORDS: Lithography, Lithographic illumination, Logic devices, Critical dimension metrology, Photomasks, Optical proximity correction, Etching, Scanners, Electroluminescence, Semiconductors

Read Abstract +

Proceedings Article | 4 May 2005 Paper

Process optimization of developer soluble organic BARC and its characteristics in CMOS devices

Yeon Hwa Lim, Young Keun Kim, Jae Sung Choi, Jeong Gun Lee

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600437

KEYWORDS: Photoresist developing, Critical dimension metrology, Semiconducting wafers, Photoresist processing, Photoresist materials, CMOS devices, Reflectivity, Plasma etching, Etching, Lithography

Read Abstract +

Proceedings Article | 28 May 2004 Paper

The study of contact hole MEEF and defect printability

Chang-Young Jeong, Yeon Hwa Lim, Hong Ik Kim, Jeong Lyeol Park, Jae Sung Choi, Jeong Gun Lee

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536252

KEYWORDS: Photomasks, Critical dimension metrology, Semiconducting wafers, Chromium, Optical lithography, Semiconductors, Lithographic illumination, Inspection, Cadmium, Integrated circuits

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years