Yeon Hwa Lim
Member of Technical Staff at MagnaChip Semiconductor
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 21, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Semiconductors, Lithography, Lithographic illumination, Etching, Scanners, Electroluminescence, Photomasks, Logic devices, Optical proximity correction, Critical dimension metrology

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Etching, Reflectivity, Photoresist materials, Plasma etching, Critical dimension metrology, Photoresist processing, Semiconducting wafers, CMOS devices, Photoresist developing

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Semiconductors, Optical lithography, Lithographic illumination, Cadmium, Inspection, Chromium, Photomasks, Integrated circuits, Critical dimension metrology, Semiconducting wafers

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