Dr. Yezheng Tao
at Univ of California San Diego
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 8 April 2011 Paper
Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, M. Tillack, F. Najmabadi
Proceedings Volume 7969, 796930 (2011) https://doi.org/10.1117/12.881223
KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, Nd:YAG lasers, Tin, Ions, Metrology, Extreme ultraviolet lithography, Laser energy, Carbon dioxide lasers

Proceedings Article | 20 March 2010 Paper
Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, N. Amin, N. Shaikh, M. Tillack, F. Najmabadi
Proceedings Volume 7636, 76360D (2010) https://doi.org/10.1117/12.848407
KEYWORDS: Carbon dioxide lasers, Plasma, Tin, Pulsed laser operation, Carbon dioxide, Extreme ultraviolet, Extreme ultraviolet lithography, Nd:YAG lasers, Laser beam diagnostics, Absorption

Proceedings Article | 18 March 2009 Paper
Russell Burdt, Sam Yuspeh, Kevin Sequoia, Mark Tillack, Yezheng Tao, Farrokh Najmabadi
Proceedings Volume 7271, 72712Z (2009) https://doi.org/10.1117/12.814233
KEYWORDS: Laser ablation, Ions, Tin, Extreme ultraviolet, Silicon, Plasma, Extreme ultraviolet lithography, Spectroscopy, Pulsed laser operation, Diagnostics

Proceedings Article | 18 March 2009 Paper
Sam Yuspeh, Kevin Sequoia, Yezheng Tao, Mark Tillack, Russell Burdt, Farrokh Najmabadi
Proceedings Volume 7271, 727136 (2009) https://doi.org/10.1117/12.814167
KEYWORDS: Plasmas, Extreme ultraviolet, Optical spheres, Absorption, Tin, Extreme ultraviolet lithography, Diagnostics, Performance modeling, Temperature metrology, Laser beam diagnostics

Proceedings Article | 13 September 2007 Paper
Y. Tao, M. Tillack, K. Sequoia, R. Burdt, F. Najmabadi
Proceedings Volume 6703, 67030A (2007) https://doi.org/10.1117/12.731032
KEYWORDS: Plasmas, Tin, Extreme ultraviolet, Pulsed laser operation, Absorption, Foam, Solids, Gas lasers, Extreme ultraviolet lithography, Laser energy

Showing 5 of 6 publications
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