Dr. Yi-Hsing Peng
Senior Product Engineer at ASML San Jose
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Light sources, Lithography, Manufacturing, Yield improvement, Deep ultraviolet, Scanners, Semiconducting wafers

Proceedings Article | 4 October 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Photovoltaics, Modulation, Beam shaping, Metals, SRAF, Control systems, Source mask optimization

Proceedings Article | 25 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Scanning electron microscopy, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Logic, Image processing, Process control, Electron microscopes, Tolerancing, Distance measurement, Lithography, Finite element methods, Calibration

Proceedings Article | 15 October 2004
Proc. SPIE. 5517, Linear and Nonlinear Optics of Organic Materials IV
KEYWORDS: Polymers, Waveguides, Polymer multimode waveguides, Microrings, Resonators, Bistability, Switches, Fabrication, Refractive index, Picosecond phenomena

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