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Yi-Hung Chen
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Publications (2)
Proceedings Article | 9 January 2008 Paper
A surface-plasmon resonance phase modulation bio-reaction detection system with (5,1) phase-shifting algorithm
Yi-Hung Chen, Shu-Sheng Lee, I-Hung Hsu, Eddie Tseng, Chih-Kung Lee
Proceedings Volume 6800, 68001Q (2008) https://doi.org/10.1117/12.769156
KEYWORDS: Phase shifts, Phase modulation, Phase shift keying, Surface plasmons, Modulation, Detection and tracking algorithms, Dielectrics, CCD cameras, Control systems, Actuators
Proceedings Article | 15 July 2003 Paper
Complete monitoring strategy to quantify matching and performance for multiple CDSEM in advanced fab
Pey-Yuan Lee, Chi-Shen Lo, Yi-Hung Chen, Thomas Teng, Steven Fu, Mico Chu, Jason Yee
Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485227
KEYWORDS: Metals, Data modeling, Materials processing, Material characterization, Diagnostics, Manufacturing, Carbon, Contamination, Plasma, Critical dimension metrology
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