Yi-Hung Chen
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Actuators, Surface plasmons, Detection and tracking algorithms, Phase modulation, Modulation, Dielectrics, Phase shift keying, Control systems, CCD cameras, Phase shifts

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Carbon, Contamination, Data modeling, Metals, Materials processing, Manufacturing, Diagnostics, Critical dimension metrology, Material characterization, Plasma

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